Micro-electromechanical Systems (MEMS) and Nano-electromechanical Systems (NEMS) Technologies for Temperature Sensitive Semiconductors and Smart Materials. The development of a generic MEMS/NEMS technology will place Australia at the forefront of MEMS science and technology and will form a platform for new and innovative products using new science developed from the capabilities to be established in this project. This project and the results it will generate will have significant impact in devel ....Micro-electromechanical Systems (MEMS) and Nano-electromechanical Systems (NEMS) Technologies for Temperature Sensitive Semiconductors and Smart Materials. The development of a generic MEMS/NEMS technology will place Australia at the forefront of MEMS science and technology and will form a platform for new and innovative products using new science developed from the capabilities to be established in this project. This project and the results it will generate will have significant impact in developing technologies that can transform Australian industry in biomedical and agricultural instrumentation and will be key to future optoelectronic defence systems for surveillance, and chemical and biological threat warning. It will have the potential to establish new industries, as well as generate disruptive technologies directly relevant to several industry sectors already established in Australia.Read moreRead less
Linkage Infrastructure, Equipment And Facilities - Grant ID: LE0238960
Funder
Australian Research Council
Funding Amount
$940,000.00
Summary
High Performance Semiconductor Micromachining Facility. The purpose of this project is to make available to the Australian semiconductor research community a facility to undertake specialist deposition and etching tasks needed for fabrication of next generation solar cells, microelectronics, optronics, and micro-electromechanical systems. The facility will have the flexibility to allow independent control of major process parameters, allowing development of new fabrication technologies which wi ....High Performance Semiconductor Micromachining Facility. The purpose of this project is to make available to the Australian semiconductor research community a facility to undertake specialist deposition and etching tasks needed for fabrication of next generation solar cells, microelectronics, optronics, and micro-electromechanical systems. The facility will have the flexibility to allow independent control of major process parameters, allowing development of new fabrication technologies which will be generic to a wide range of semiconductor materials. In particular, the facility will be unique in its ability to perform processes at low temperatures, and under conditions that allow optimisation of the deposition and etching processes, without compromising the performance of delicate devices or exceeding the maximum process temperature limitations found in many mainstream semiconductor materials technologies.Read moreRead less
Linkage Infrastructure, Equipment And Facilities - Grant ID: LE0667994
Funder
Australian Research Council
Funding Amount
$1,000,000.00
Summary
National Nanolithography Facility. Nanotechnology is expected to have a major impact on quality of life and global economy. It is predicted to generate revenues as big as the ICT sector in 20 years time. The National Nanolithography Facility will enhance the Australian capability in the field of nanoscale science and technology. This will enable Australian researchers to achieve major impacts in many areas of nanotechnology with a strong potential impact on industry sectors such as computers, ....National Nanolithography Facility. Nanotechnology is expected to have a major impact on quality of life and global economy. It is predicted to generate revenues as big as the ICT sector in 20 years time. The National Nanolithography Facility will enhance the Australian capability in the field of nanoscale science and technology. This will enable Australian researchers to achieve major impacts in many areas of nanotechnology with a strong potential impact on industry sectors such as computers, communications, defence, health, bio-security. This facility has the potential for developing new technologies of fundamental as well as applied interest.Read moreRead less
New multiplexed optical read-out technologies for micromachined cantilever sensor arrays. Passive sensing of chemical and biological agents is an essential capability in fields as diverse as national security, agriculture, mining and medicine. In many cases, generic sensing (e.g. are there pesticides present) as well as specific sensing (which pesticide) are both important. While sensors based on micro-electromechanical systems (MEMS) have shown extremely high performance at low cost, they have ....New multiplexed optical read-out technologies for micromachined cantilever sensor arrays. Passive sensing of chemical and biological agents is an essential capability in fields as diverse as national security, agriculture, mining and medicine. In many cases, generic sensing (e.g. are there pesticides present) as well as specific sensing (which pesticide) are both important. While sensors based on micro-electromechanical systems (MEMS) have shown extremely high performance at low cost, they have been limited to detection of a specific substance. Success in this project will make low cost generic MEMS-based sensors a reality, allowing, for the first time, wide-spread use of sensitive sensing systems in applications such as farming, container transport security, general medical practice and national security.Read moreRead less