Integrated Piezoelectric Microsystems for Actuation and Sensing. Piezoelectric transducers provide the highest positioning accuracy of any known actuator and the highest dynamic force resolution of any known sensor. However, these capabilities are limited to macro scale applications since piezoelectric materials are not compatible with integrated circuit (IC) or Micro-Electro-Mechanical Systems fabrication processes. This project aims to extend the use of piezoelectric materials to the meso- and ....Integrated Piezoelectric Microsystems for Actuation and Sensing. Piezoelectric transducers provide the highest positioning accuracy of any known actuator and the highest dynamic force resolution of any known sensor. However, these capabilities are limited to macro scale applications since piezoelectric materials are not compatible with integrated circuit (IC) or Micro-Electro-Mechanical Systems fabrication processes. This project aims to extend the use of piezoelectric materials to the meso- and micro-scale by fabricating miniature piezoelectric positioning and sensor systems. These devices will include six-axis nano-positioners and ultra-high resolution accelerometers and gyroscopes. This technology will create a new market for devices that are lower cost than macro-scale systems but provide higher performance than silicon based microsystems.Read moreRead less
Discovery Early Career Researcher Award - Grant ID: DE130100879
Funder
Australian Research Council
Funding Amount
$375,000.00
Summary
Design, modelling and advanced control of high performance nanopositioners for atomic force microscopy. A high-speed nanopositioner with nanoscale manoeuvring accuracy is used extensively in nanotechnology applications such as biological cell studies and nanomanipulation. This project seeks to address fundamental problems associated with the design and control of nanopositioners, which will subsequently benefit Australian nanotechnology research.